3

Design and characterization of in-plane MEMS yaw rate sensor

Année:
2009
Langue:
english
Fichier:
PDF, 506 KB
english, 2009
6

Effect of metal coating and residual stress on the resonant frequency of MEMS resonators

Année:
2009
Langue:
english
Fichier:
PDF, 301 KB
english, 2009
19

Capturing higher modes of vibration of micromachined resonators

Année:
2009
Langue:
english
Fichier:
PDF, 5.52 MB
english, 2009